Accuracy really can be this compact

For production applications in the semiconductor industry, position measurement must be accurate, reliable, and dynamic. At SEMICON KOREA, HEIDENHAIN presented innovative solutions that are setting new standards in the industry.

The LIP 6000 from HEIDENHAIN, the MC 15 from RSF, and the LIKgo from NUMERIK JENA are the most compact linear encoders of their respective classes, and boast the following characteristics:

  • Measuring steps down to 1 nm, 0.05 µm, or 1 µm
  • High installation flexibility for constricted spaces
  • Low-mass scanning heads
  • Dynamic measurements at high traversing speeds and under strong acceleration

The VULCANO XY system from ETEL is a highly integrated motion system with a portal design. It thrives in applications requiring high dynamics and position accuracy. Here are its main benefits and features:

  • Low operating costs
  • Integrated, high-resolution optical angle encoders from HEIDENHAIN
  • Modularly expandable, such as with the QuiET active isolation system for vibration isolation